A company that developed phase-change memories needed a heated cluster tool for deposition processes and other manufacturing steps.
The resulting tool from Momentive Performance Materials, Strongsville, Ohio (momentiveceramics. com), uses a rotating heater made of pyrolytic boronnitride ceramics. The device can reach 1,500°, heats up at 600°C/min, and has a thermal uniformity greater than 99%. A quartz separating plate serves processes or materials that need temperatures above 300°C; for lower temperatures, the plate is copper.