A decoupling arrangement that uses mechanical cross-roller bearings instead of air bearings for ball-screw drives lets the company’s PMT 160 Series stages give straightness and flatness runout of 50 nm or less.
The system isolates transverse movement of the ball screw from the linear-bearing system and saddle of the stage.
The application of flexure designs eliminates disturbance forces that elastically deform the base plate, bearing, and saddle and interfere in the straightness and flatness of the whole stage system.
The PMT 160 offers travels from 50 to 300 mm, with standard positioning accuracy of less than 10 μm and repeatability of ± 0.5 μm when driven by either dc servomotor (with rotary encoder) or dc stepper motor.
217 Middlesex Turnpike
Burlington, MA 01803
(781) 273- 6220