The HR-V and HR-UV Series of piezoelectric motors are for use in vacuum environments...
The HR-V and HR-UV Series of piezoelectric motors are for use in vacuum environments with ratings to 10- 7 Torr for the HR-V and 10- 10 Torr for the HR-UV Series. The motors range in size from a single-element (0.45 kg of force) to an eight-element (3.6 kg of force) motor and can drive both linear and rotary stages. Both series are suitable for bake out and operate without any magnetic field, so they are ideal for e-beam writing and inspection and any process sensitive to magnetic fields.
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