The systems have low runout accuracies while still using mechanical linear bearings. Covered are single multiaxis precision stages, some with resolutions to 5 nm and motors and controllers built in to save space. Various drive mechanisms such as ball screw, linear motor, and piezo motor are available.

Steinmeyer Inc., 217 Middlesex Turnpike, Burlington, MA 01803, (781) 273-6220, steinmeyer.com