Motion analyzer for MEMs

Aug. 18, 2005
The MSA-400 micro system analyzer provides precise 3D dynamic characterization of microelectromechanical systems (MEMs) and microoptoelectromechanical-(MOEMs) microstructures.

The device's fully integrated probe head microscope measures and displays microstructure motions, which simplifies identification of microstructural resonances in all three dimensions. Broadband out-of-plane vibrations are characterized with Laser Doppler Vibrometry (max. 20-MHz, sub-pm resolution) and in-plane displacements with stroboscopic video microscopy (max. 2-MHz, 1-nm resolution). An available second laser measures differential out-of-plane vibrations between scanned and fixed locations. The system easily integrates with probe stations for wafer-level measurements, has excellent image quality, high lateral resolution, and diffraction-limited probe spots. Polytec Inc., 1342 Bell Ave., Suite 3A, Tustin, CA 92780, (714) 850-1835, ext. 13, polytec.com

Sponsored Recommendations

June 27, 2025
Ensure workplace safety and compliance with our comprehensive Lockout/Tagout (LOTO) Safety Training course. Learn critical procedures to prevent serious injuries.
June 27, 2025
Join our expert webinar to discover essential safety control measures and best practices for engineering a truly safe and compliant industrial environment.
June 25, 2025
An innovative aircraft with electric drives combines the best of both worlds. The cross between drone and helicopter could mean significantly faster and more efficient air emergency...
June 25, 2025
Effective when other materials fail, ceramics are particularly suitable for applications requiring wear and chemical resistance, sliding characteristics or biocompatibility. Discover...

Voice your opinion!

To join the conversation, and become an exclusive member of Machine Design, create an account today!