Machinedesign 2452 0611steinmayer 0 0

Precision vacuum stages

June 1, 2011
Model MT105-LM-HV precision stages are suitable for ultrahigh vacuum applications.

Model MT105-LM-HV precision stages are suitable for ultrahigh vacuum applications.

Features & benefits

  • Two-axis (XZ) version travels 30 or 50 mm with positioning accuracy of 3 µm and repeatability of ±0.2 µm

  • Classic XY stage (without adapter plate) or XYZ configuration; piezomotor driven, stainless-steel crossed-roller-linear bearings for smooth motion; stiff aluminum base and saddle

  • All other components and hardware for ultrahigh vacuum use; 10E-10 torr

Steinmeyer Inc.
(781) 273-6220
feinmess.de/content/cnt_cnt/docid_708/iso_en

Sponsored Recommendations

Precision Motion Control for Robotics Systems

April 8, 2024
Learn more about Precision Motion Control for your Robotic Systems through Harmonic Drive's latest Webinar!

KNF Pumps Revolutionize Desert Dust Tracking

April 3, 2024
The Sahara Desert is one of the biggest sources of dust worldwide. KNF air sampling pumps help tracing this particulate matter air pollution.

Introducing the Mass Flow Rate Calculator

April 3, 2024
The KNF Mass Flow Rate Calculator makes it easy to convert volume flow rate to mass flow rate. Simply enter the volume flow and the gas or gas mixture.

Explore KNF's Cutting-Edge DC-BI Pump Drive Technology

April 3, 2024
With six new DC-BI pump series, KNF launches an entirely new pump drive technology relying on advanced BLDC motors and achieving unprecedented advantages.

Voice your opinion!

To join the conversation, and become an exclusive member of Machine Design, create an account today!