The AVS1000 Series stages are for positioning large or heavy loads over verysmall incremental movements in elevation above a horizontal plane. The stage’s low profile and precise motion make them suitable for semiconductor manufacturing and inspection, automated tool alignment, machine-vision inspection, and laser machining.
Using a moving-wedge design, the stage provides precise load elevation in the vertical plane. The wedge block converts horizontal movement from a precision-ground ball screw into vertical elevation of the tabletop. Pitch and yaw characteristics over the length of travel minimize the impact of angular errors. The stage features 5-nm resolution and ±1-μm accuracy, with the ability to move large loads up to 135 kg.
Sealed guide bearings with wipers provide payload capability, long life, and smooth, precise motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is assured.
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