Model MT105-LM-HV precision stages are suitable for ultrahigh vacuum applications.
Features & benefits
Two-axis (XZ) version travels 30 or 50 mm with positioning accuracy of 3 µm and repeatability of ±0.2 µm
Classic XY stage (without adapter plate) or XYZ configuration; piezomotor driven, stainless-steel crossed-roller-linear bearings for smooth motion; stiff aluminum base and saddle
All other components and hardware for ultrahigh vacuum use; 10E-10 torr