Compared to conventional piezo-tube scanners, the low-bow, flexure-guided piezo stages are run in closed-loop mode and provide significantly lower out-of-plane motion (flatness) and better linearity. A special stage designed with a new lead-free piezo material allows resolution down to 20 picometers and less than 1-nm hysteresis.
Flexure stages with 1,800-micron travel ranges and many different configurations from single axis to six-axis systems are available.
Self-locking ultrasonic motor stages with long travel ranges to 200 mm are available for prepositioning, and as a stable base for the high-speed piezo scanners.
Physik Instrumente L.P., 16 Albert St., Auburn, MA 01501, (508 832-3456, www.pi-usa.us