XYZ positioner for wafer inspection

July 11, 2001

A four-axis positioning system intended for 200 and 300-mm wafer inspection features brushless digital servo-control for all four axes. The XY table is based on a high-precision linear-motor stage with 100-nm resolution position feedback. The Z axis has a direct-reading, noncontacting vertical encoder with various resolution options down to 2 nm. The Theta axis is integrated into the Z axis with a direct-drive brushless servo and high-resolution rotary encoder. The servo-control is a Micromatic-5, four-axis version including a DSP motion controller and high-powered digital servo-amplifiers, supplied as a single enclosure control with RS-232/RS-422 port or PC-supported card. X travel ranges from 200 to 1,000 mm, Y travel goes from 100 to 600 mm, and Z travel ranges from 10 to 24 mm. Theta rotation range is 2 to 360?.

Nutec Components Inc., 100 Jefryn Blvd., Deer Park, NY 11729, (631) 242-1225.

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Comments

student

On August 28th, 2009 Mohamed Ali (not verified) says:

Hi,
I'm a student from Egypt, Cairo (Greetings from Egypt)
I need to measure the temperature inside the flame using thermocouples, i need to move this thermocouple probe each 0.1 mm in all directions with maximum stroke (x=100mm, y=100mm, z=500mm).
i need to control this movement computerized with minmum distance about 2 meters at least between the control system and the mechanism.
i don't need to carry more than 1 kg.
i need a very simple design and very high accuracy (in micro meters) because its a research point for my phd so, all data must be accurate.
plz try to do it as low price as you can.
plz if your system capable my requirements, plz send me the final total featues, and the total price.
Thanks
Mohamed Ali