An Agile Systems MAX 3000 (top) powers Nanometrics metrology stations (above).
An Agile Systems MAX 3000 (top) powers Nanometrics metrology stations (above).

An Agile Systems MAX 3000 (top) powers Nanometrics metrology stations (above).


Integrated metrology systems by Nanometrics Inc. had to scan 300-mm wafers quickly to look for defects in films, but could only take up a minimum of space in clean rooms. A MAX 3000 controller from Agile Systems was a natural candidate for controlling the motion of wafer scanning electronics because it fit in a space 3 5 2 in. It took the place of an external box the size of a large PC chassis that was used in previous generations. For the Nanometrics controller Agile devised a special daughterboard which carried extra I/O and sin/cos high-resolution encoders to work with the direct-drive stage. The motors can completely spin a 300-mm wafer in 400 msec and make a 7-in. move in 400-msec hitting a top speed of 21 ips with submicron accuracy. The only external cables to the controller are a power cable and a FireWire connection which also carries machine vision video.

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Agile Systems, Ontario, Canada,
agile-systems.com
Nanometrics Inc., Milpitas, Calif., nanometrics.com