The Delta II flow-ratio controller measures, divides, and controls user-specified ratios of mixed gas flows to several zones or chambers.
It features a 20:1 dynamic ratio control range and faster gas-flow response for shorter cycle times and increased throughput. E-diagnostics, which are accessible through an embedded Ethernet interface, permit real-time monitoring without removing the controller or breaking gas lines. The digital control loop maintains tight control independent of the gas mix or changes in input gas flow.
MKS Instruments Inc., 90 Industrial Way, Wilmington, MA, 01887, (800) 227-8766, mksinst.com